MKS Instruments Data Breach Investigation

Turke & Strauss LLP, a leading data breach law firm, is investigating MKS Instruments, Inc., the U.S. parent company of the MKS and Atotech group of companies, regarding its recent data breach. The MKS Instruments data breach involved sensitive personal identifiable information and protected health information belonging to an undetermined number of current or former employees.


MKS Instruments is a process control corporation that specializes in producing semiconductor products. Founded in 1961, MKS Instruments began by focusing on a broad array of technologies to control and monitor manufacturing processes. By the early 2000s, MKS Instruments was beginning to experience rapid growth with the digitization of the manufacturing industry, acquiring several advanced technology companies, including Atotech, a specialty chemical manufacturer. Today, MKS Instruments generates approximately 60% of its revenue from the sale of semiconductor products, priding itself on process improvements in semiconductor miniaturization and speed. Headquartered in Andover, Massachusetts, MKS Instruments operates offices and facilities across North America, Europe, and Asia. MKS Instruments employs roughly 5,400 individuals and has a market capitalization of more than $11 billion.


On February 13, 2023, MKS Instruments discovered that it had experienced a data breach in which the sensitive personal identifiable information and protected health information in its systems may have been accessed. Through its investigation, MKS Instruments determined that an unauthorized actor may have accessed this sensitive information by launching a ransomware attack. On February 16, 2023, MKS Instruments began contacting individuals whose information may have been impacted. The type of information exposed includes:

  • Name
  • Social Security number
  • Date of birth
  • Address and contact information
  • Financial information (e.g., bank account information, payment card information)
  • Employment information (e.g., compensation, job title, time/hours worked, employment history, education information, basic dependent contact information, work login credentials/password)
  • Categorical information (e.g., marital status, veteran status, nationality, immigration status, race, gender or sexual orientation status)
  • Health insurance information
  • Medical information (e.g., disability information, medical diagnosis information)

If you are a current or former employee of MKS Instruments, MKS, or Atotech:

We would like to speak with you about your rights and potential legal remedies in response to this data breach. Please fill out the form, below, or contact us at (608) 237-1775 or

If you were impacted by the MKS Instruments data breach, you may consider taking the following steps to protect your personal information.

  1. Carefully review the breach notice and retain a copy;
  2. Enroll in any free credit monitoring services provided by MKS Instruments, Inc.;
  3. Change passwords and security questions for online accounts;
  4. Regularly review account statements for signs of fraud or unauthorized activity;
  5. Monitor credit reports for signs of identity theft; and
  6. Contact a credit bureau(s) to request a temporary fraud alert.

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